X-ray Microanalysis for SEM and TEM



Oxford Instruments’ INCA system is the world’s leading platform for X-ray Microanalysis on the Scanning Electron Microscope (SEM) and Transmission Electron Microscope ( TEM). Software and detector technology for Energy Dispersive Microanalysis (EDS), as well as Wavelength Dispersive Microanalysis (WDS) and Electron Backscatter Diffraction (EBSD) are all seamlessly integrated into this single universal platform. INCA means power and productivity. The system has been designed and built using over 30 years of microanalysis experience together with valuable input from the people who use this equipment for real applications -our customers.

Energy Dispersive X-ray Fluorescence Spectrometer (EDS)

Oxford Instruments have designed hardware for the INCA platform which combines excellence in both detector and pulse processor performance. Hardware designed specifically to give the high quality, stable output required for accurate, automatic peak identification, and standardless, quantitative analysis over a range of useful count rates. The INCAx-sight EDS detector, the INCAx-stream digital pulse processor and the INCAEnergy EDS software are a total solution for EDS needs around the world.


Wavelength Dispersive X-ray Fluorescence Spectrometer (WDS)

The INCAWave WDS microanalysis system offers unrivalled accuracy and convenience for the analysis of minor and trace elements in the SEM. Today INCAWave remains the only practical solution available for analysts looking for electron microprobe quality results combined with the flexibility of a scanning electron microscope and at a fraction of the cost. The INCAWave WDS detector, the INCAWave spectrometer electronics and the INCAWave software combine in total harmony to make INCA a complete system that works accurately and productively.