Products - Tescan - Scanning Electron Microscope (SEM)

Scanning Electron Microscope (SEM)

Scanning Electron Microscope – VEGA model
Scanning Electron Microscope provide the best solution for your topographic and surface analysis tools. Tescan brings the top level technical solutions in the branch of electron microscopy and through the satisfied customers’ public to keep holding its position among the leading groups and companies in the field of electron microscopy.

Equipped with an inventive new four-lens arrangement. Employs a unique system of electron optics control based on a PC, providing the user with powerful and distinct advantages over conventional SEMs. The main optics configuration consists of:

• Electromagnetic beam centering system below the anode
• Double condenser lens system with spray diaphragm
• Intermediate lens (IML) with its own electromagnetic centering system
• Fixed aperture placed inside the intermediate lens above the objective lens with the scanning coils
• Scanning coils and octupole stigmator
• Conventional tungsten electron gun

With the new four optics configuration TESCAN SEM has four modes of viewing,

• ‘Fish-eye’ mode provides a ‘macro’ view of the sample
• ‘Field’ mode optimizes the column to provide an extra large field of view
• ‘Depth’ mode sets the column up in a mode, which enhances the depth of focus
• ‘Resolution’ mode automatically configures the column to produce the highest resolution for the chosen working conditions

Tescan tungsten electrode SEM, VEGA Model, has a resolution of 3 nm and magnification from 13 x to 1,000,000 x. All microscope functions are controlled by means of PC via the VegaTC program using Windows™ platforms. Vacuum control, Filament heating, Gun Alignment, Centering of Resolution mode, Compensation for kV, Probe Current optimized for Spot Size, Spot Size optimized for Magnification, Scanning Speed, Contrast & Brightness, Focus & Stigmator, Look up Table, all have automatic control.

Two types of column are offered:

VEGA TS 5130 – conventional model operating at a high vacuum of approximately 5 x 10-3 Pa

VEGA TS 5136 Complete – variable pressure microscope modification, which combines the advantages of the basic VEGA with extended facility for low vacuum operation. In low vacuum mode, non conductive specimens can be examined in their natural, uncoated state, using all working modes of the optical system at pressures up to 150 Pa and in Resolution mode at pressures up to 500 Pa.

VEGA system also offered several types of chamber designs, small chamber, medium chamber, large chamber with two options of suspension, mechanic dampening and pneumatic suspension. It has also an option to have manual or automated stage. Large chamber will have 11 chamber interface ports and a comprehensive choice of detectors and accessories as well as optimized analytical geometry allowing simultaneous EDX, WDX and EBSD.

SEM Accessories and configuration that can be attached:

• Low Vacuum Secondary Tescan Detector (LVSTD)
• Transmitted Electron (TE) detector
• Electron Beam Induced Current (EBIC)
• Engery Dispersive X-ray Fluorescence Spectrometer (EDX)
• Wavelength Dispersive X-ray Fluorescence Spectrometer (WDX)
• Electron Back-Scattered Diffraction (EBSD)
• CL Detector
• Probe current measurement
• Chamber view camera
• Touch Alarm
• Cooling stage with Peltier Couple

Application
Industrial Application
Electronic & Microelectronic
Biomedical Application
Biology
EDX WDX Application